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Papers共 79 篇Author StatisticsCo-AuthorSimilar Experts

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Photomask Linewidth Comparison by PTB and NIST
D. Bergmann,B. Bodermann,H. Bosse,E. Buhr,G. Dai,R. Dixson,W. Haessler-Grohne,K. Hahm,M. Wurm
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (2015)
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