By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
时间
引用量
主题
期刊级别
合作者
合作机构
Eric Ma,Weiming Ren,Xinan Luo, Shuo Zhao,Xuerang Hu,Xuedong Liu,Chiyan Kuan,Kevin Chou,Martijn Maassen,Weihua Yin, Aiden Chen, Niladri Sen,Martin Ebert,Lei Liu,Fei Wang,Oliver D. Patterson
Metrology, Inspection, and Process Control for Microlithography XXXIV (2020)
Metrology, Inspection, and Process Control for Microlithography XXXIII (2019)
35th European Mask and Lithography Conference (EMLC 2019) (2019)
Eran Amit,Jason Arjavac, P.R. Atkins, Angela Brett,Brian M. Barnes, Norman Birnstein, Sergey M. Borisov,Sascha Brose, V. Brouzet,Stefan Buhl,Benjamin Bunday,Sven Burger, Hsien-Hung Chang,Jun‐Dong Chang, Nick Chang, Alon Chen,Kai-Hsiung Chen, Cheng Zhang, Chu-Han Chiu,Kevin Chou, Hung‐Kuo Chu,James Clarke, Avi J. Cohen, Andrew Cross, Den Boef, S Desmoulins,Christophe Dezauzier, Alain C. Diebold, Hideto Dohi,J. Ducotè, Albrecht Eberle,Martin Ebert, Mark G. Eller,Fang Wei, Hans Fritz,Andreas Frommhold, L. I. Gershteǐn, Eva Giannatou,Sven Glabisch,Anna Golotsvan, V Gredy, Charles Hagen, Reza Hajiahmadi, S. Hayashi,Mark-Alexander Henn,Jan Hermans, Akiko Hirai, Katsumi Hirose, Ho‐Han Hsu, Kwang-Young Hu, Guo Cai Huang, Shang‐Yu Huang, T.J. Huisman, Joey Hunsche, Jisung Hwang,Ishikawa Masayoshi,Izawa Masayuki, J. Simon Tony, Kai Kal, Nora N. Kammer, Angela Karvtsov, N Kaufmann, Hideyuki Kazumi,Anne Kenslea, Robert S. Kern, Mehdi Kessar, Sasan Keyvani,T Kiers, Jin‐Hoi Kim, Wansoo Kim, Young‐Seok Kim, Grigory Klebanov,Dana Klein,Sung-Woo Ko, Richard Kris, P. Kruit, Stefan Kuiper,Stéphane Larivière, Le Lazzarino, Delphine Le Cunff, L Lecarpentier, Brian Lee, D. A. Lee,D.S. Lee,Ho-Se Lee, Julie Lee, Jun Lei,Bertrand Le-Gratiet, Patrick Lemaire,Shimon Levi, Susan R. Levy, John C. Lin, Yu‐Ju Lin,Rex Liu,Gian F. Lorusso, Hsiang-Lan Lung,Lu‐Fang Ma,Ruben Maas,Chris A. Mack, Jan Willem Maes,Antonio Mani,Ming Mao,Gino Marcuccilli, Melvin Mathew, T. McDaniel, Olivier Mermet, Robert Michels,A Mili,Matthieu Milléquant,Milo Renan, Hiroshi Miroku, A. Moussa, Ingrid Müller,Victoria Naipak,Dan Nelson, Duyen Thi Cam Nguyen, Nishihata Noifeld, Ondřej Novák, Ankush Oberai,Nang-Lyeom Oh, Bryan Orf, Jason W. Osborne,Alain Ostrovsky,Shyh-Shii Pai,Chan-Ha Park, Chris Park,Shin-Woong Park,Anne Pastol, Svetlana Pastur, Oliver D. Patterson, Carlos A. Pereira, Jeffrey L. Peters, C. R. M. Prentice, Jie Zhang,Ivo W. Rangelow, Ao Ren,Christoph Reuter,John Robinson,Justin Roller,Vito Rutigliani, E. A. Schweikert,Shahrjerdy Mir,Yoshiki Shiba,Yong Kong Siew, Richard T. Silver,Aileen Soco, Ewa Sommer, Hyung-Sub Son,Hans-Jürgen Stock, Su Sufrin, Weiqiang Sun, Pei Tang,Wim Tel, David Tien,Ashley Tilson,Ian Tolle,J.H. Tortai, Li-Shiuan Tsai, Stephen Tseng,Dieter Van den Heuvel, Maarten van Es,Luc van Kessel, Van Roey,Stanislav V. Verkhoturov, Alon Volfman, F Wang, Y. Wang, Wei Weintraub, R Willekers
openalex（2019）
Michael Ahmad, Ki Ahn, Altamirano Sanchez, Kerim T. Arat, Nyan Aung, Azuma Tsukasa, Marcel Beems,Genevieve Beique, Eric Beisser, Belen Bellmann, A. F. Bello, Ben-Dov Bevis, Yoann Blancquaert, Cédric Boeckx, Jens Bolten, Justin Brown, Richard Bruls,Stefan Buhl,Benjamin Bunday,Sven Burger, Jin-Moo Cadoux, Ngoc Thien Huong Cai, Hakki Ergun Cekli, Aron Cepler,Anne-Laure Charley, Bryan Chen, Charlie Chen, Chia‐Hung Chen, Chu-En Chen, Hsiang-Lin Chen, K Chen, Chen, Jo-Lan Chin, Sang‐Joon Cho, W.Y. Cho, Kuo-Yao Chou, Shu-Chuan Chuang, Woong Jae, Avi J. Cohen, La De, Adam Peña, James Demarest, Onur N. Demirer,Arie den Boef, L. Depré, A. Dervilllé, Diane Lorenzo, Alain C. Diebold,Martin Ebert, Yasin Ekinci, El Kodadi, Escalante Marun, Pierre Fanton, J. Foucher, Franck Foussadier,Karsten Frenner, Guillaume Freychet, François Furthner, Christian Gardin, C Gardiola, Dennis F. Gardner, Maxime Gatefait, Tsai-Sheng Gau, John G. Gaudiello, P. Gergaud, Lynford L. Goddard, Maria Laura Gödecke, Stéphane Godny, Juan-Manuel Gomez, Trey Graves, Greg Gray, Gunay-Demirkol Anil,Wei Guo, Manuela Gutsch, Jiarui Hu, Kwang-Young Hu, Chi-Hao Huang, Chin‐Chang Huang, Hao-Lun Huang, Jen Wei Huang, Vincent Huang, Andrew D. L. Humphris, Hirra Hussain, Ikota Masami, I. Paul, Vikas Jain, Martin Jak, Saebyeol Jang, Jau Jehoul, Jong‐Mun Jeong,Junqiu Jiang, Byung Jin Kang, m Cheol, Yixin Kang,Henry C. Kapteyn, Chih-Ming Ke, Hyun-Sok Kim, Ryoung-Han Kim, Yong-Sik Kim, Young Kim, Youngsik Kim,Dana Klein, Thomas Klimpel,Joshua L. Knobloch, Chiew-Seng Koay, Junji Konishi, E Koop, John A. Kramar, P. Kruit, Stefan Kuiper, Jong Kung, Vijaya-Kumar Kuppuswamy, Noh-Jung Kwak, Lola Kwan, R. La Greca, A Labrosse, Yuan‐Tzu Lan, Le Larson, Jean-Christophe Le Denmat, Mamoru Doi, Byoungho Lee, Byoung‐Hoon Lee, Julie Lee, Seung Yoon Lee, Shawn Lee, Wei Lee, Bertrand Le-Gratiet, Ming Lei,Shimon Levi, Brian Lewis, Lanny Herron, Li Chen, Chen Liao, H.T. Lin, Yu-Ching Lin, En Lio, S. R. Lokhorst,Gian F. Lorusso, N. Loubet, Ccm Carlo Luijten, Hsien-Yen Lung, Woei-Bin Luo,Chris A. Mack, Mark Mahoney, Giulia F. Mancini, M. Maret, N Martin, Timothy Mcardle, Steve McGarvey, Mc Namara, Andrey Melnikov, Giacomo Miceli, Andrei Miller, Moore Sam,Jan Mulkens, Margaret M. Murnane, Jeremy Nabeth, Ousmane Ndiaye, Tjitte Nooitgedagt, Ben Noyes, Jong Oh, Nang-Lyeom Oh, Kazunori Omote, O Mullane,Wolfgang Osten, J. A. Ott,David Owen, Chris Park, Donggyu Park, Noh-Kyoung Park, Sungkeun Park, Sang-Il Park, Sean S. Park, Hari Pathangi
openalex（2016）