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    • Research Interests
    SiliconCryogenic EtchingCryo-EtchingPlasmaCryogenic2010202020032025
    20042024

    Papers共 161 篇Patents共 24 篇Author StatisticsCo-AuthorSimilar Experts

    By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
    时间
    引用量
    主题
    期刊级别
    合作者
    合作机构
    All20252024202320222021202020192018201720162015201420132012201120102009200820072006
    Cryogenic Etching of Silicon Compounds Using a CHF3 Based Plasma
    R. Dussart, R. Ettouri, J. Nos,G. Antoun,T. Tillocher,P. Lefaucheux
    JOURNAL OF APPLIED PHYSICSno. 11 (2023)
    Cited8Views21Bibtex
    8
    21
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    Author Statistics
    00.20.40.60.81#Papers#CitationH-IndexG-IndexSociabilityDiversityActivity

    #Papers: 162

    #Citation: 2045

    H-Index: 23

    G-Index: 41

    Sociability: 5

    Diversity: 2

    Activity: 4

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    • 合作者
    • 学生
    • 导师
    Remi Dussart合作论文数
    131
    Thomas Tillocher合作论文数
    Groupe de Recherches sur l’Energetique des Milieux Ionises, CNRS/Polytech’Orleans96
    Pierre Ranson合作论文数
    47
    Mohamed Boufnichel合作论文数
    STMicroelectronics46
    Lawrence J. Overzet合作论文数
    at Dallas, The University of Texas34
    Olivier Aubry合作论文数
    GREMI - Polytech ' Orleans20
    G. Antoun合作论文数
    GREMI, Orléans University-CNRS18
    Julien Ladroue合作论文数
    17
    Mukesh Kumar Kulsreshath合作论文数
    University of Orleans16
    Sylvain Iseni合作论文数
    Ctr Innovat Competence Plasmatis15
    Christophe Cardinaud合作论文数
    Institut des Materiaux de Nantes, CNRS-Université de Nantes15
    Stolz Arnaud合作论文数
    14
    Jean-Francois de Marneffe合作论文数
    13
    V Schulz-Von Der Gathen合作论文数
    13
    Corinne Y. Duluard合作论文数
    CNRS, Université d'Orléans13
    Kaoru Maekawa合作论文数
    12
    Dufour Thierry合作论文数
    Serv Chim Analyt & Chim Interfaces, Univ Libre Bruxelles12
    Jack Nos合作论文数
    11
    Aurelie Girard合作论文数
    11
    Ronan Michaud合作论文数
    Univ Orleans11
    Mikhail Baklanov合作论文数
    North China University of Technology11
    Matthew Goeckner合作论文数
    Engineering Research Center;University of Wisconsin-Madison;Engineering Research Center, University of Wisconsin-Madison11
    X. Mellhaoui合作论文数
    11
    Valentin Félix合作论文数
    10
    Liping Zhang合作论文数
    10
    L. E. Pichon合作论文数
    9
    koichi yatsuda合作论文数
    9
    Floriane Leroy合作论文数
    8
    e h oubensaid合作论文数
    8
    Bertrand Boutaud合作论文数
    8
    Nicolas Gosset合作论文数
    7
    monali mandra合作论文数
    6
    K. Maekawa合作论文数
    6
    M Puech合作论文数
    6
    Jeong-Bong Lee合作论文数
    Department of Electrical Engineering, University of Texas at Dallas6
    Christophe Sinturel合作论文数
    6
    Marylène Vayer合作论文数
    6
    Rami Ljazouli合作论文数
    5
    Edouard Laudrel合作论文数
    5
    J. Faguet合作论文数
    5
    Rim Ettouri合作论文数
    5
    Stefan De Gendt合作论文数
    5
    Nader Sadeghi合作论文数
    5
    Jeremy Pereira合作论文数
    5
    Christian Dussarrat合作论文数
    Air Liquide, Delaware Research and Technology Center5
    Hadrien Philippe合作论文数
    4
    Laurent Schwaederlé合作论文数
    4
    J. M. Cormier合作论文数
    4
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