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Research Interests

Papers共 75 篇Author StatisticsCo-AuthorSimilar Experts

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Stable Stitching: Impact and Mitigation of Environment on Metal-Oxide Resist Imaging
Patricia P. Marin San Roman,Sonia Castellanos,Gijsbert Rispens,Rik Hoefnagels, Herman Nicolai,Lidia van Lent-Protasova, Jelte Van der Valk,Peter De Schepper,Amrit K. Narasimhan
Journal of Micro/Nanopatterning, Materials, and Metrologyno. 01 (2025)
Cited0Views0Bibtex
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Patterning Process and Electrical Yield Optimization at the Limits of Single Exposure EUV 0.33 NA: a Pitch 26nm Damascene Process
V.M. Blanco Carballo, K. Vandersmissen. B. De Wachter,K. Nafus,Y. Feurprier, A. Thiam, A. Hsu,C. Tabery, J. Doise,P. De Schepper
2024 IEEE International Interconnect Technology Conference (IITC)pp.1-3, (2024)
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Author Statistics

#Papers: 75

#Citation: 1417

H-Index: 20

G-Index: 36

Sociability: 6

Diversity: 2

Activity: 0

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