Peter Evanschitzky

Peter Evanschitzky received the Diploma in electrical engineering from the Universität des Saarlandes, Saarbrücken, Germany, and the Ph.D. degree in the field of optical surface measurement techniques from the Technische Universität München, Munich, Germany, where he developed a simulator for interferometrical speckle measurement systems and a new interferometrical surface shape measurement system for rough surfaces. He is currently a scientist with the Fraunhofer Institute for Integrated Systems and Device Technology (IISB), Erlangen, Germany. His field of research is lithography simulation. He has coauthored the lithography simulator Dr. LiTHO.