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Research Interests

Papers共 110 篇Author StatisticsCo-AuthorSimilar Experts

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Defect Inspection Methodology for Contact Holes
D. Van den Heuvel, C. Beral, B. Chowrira,P. Foubert,D. De Simone, G. Lorusso, M. Beggiato, S. Das, A. Charley, M. Sugie,N. Ban, H. Koike, M. Isawa, W. Sun
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII（2024）
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An Update on the Improvement in Optimization of Point-of-use Filtration of Metal Oxide Photoresists
Tetsu Kohyama, Kashif Choudry,Jan Doise,Shu-Hao Chang,Michael Kocsis, Peter D. Schepper,Philippe Foubert
Advances in Patterning Materials and Processes XLI (2024)
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Latest Advances in EUV Patterning for Preparation of High Numerical Aperture EUV
Soichiro Okada, Arnaud Dauendrffer,Yuhei Kuwahara,Cong Que Dinh, Ken Ando, Atsushi Tsuboi,Kathleen Nafus, Nobuyuki Fukui,Philippe Foubert,Danilo D. Simone
Advances in Patterning Materials and Processes XLI (2024)
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Holistic Litho-Etch Approach Towards High NA EUV Challenges
Soichiro Okada,Arnaud Dauendorffer,Yuhei Kuwahara,Satoru Shimura,Philippe Foubert,Danilo De Simone,Cong Que Dinh, Ken Ando, Atsushi Tsuboi, Nobuyuki Fukui,Arame Thiam,Yannick Feurprier,Kathleen Nafus
International Conference on Extreme Ultraviolet Lithography 2023 (2023)
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Defectivity Reduction in EUV Resists Through Novel High-Performance Point-Of-Use (POU) Filters
Yiren Zhang,Toru Umeda, Hirokazu Sakakibara, Sheik Ansar Usman Ibrahim, Atsushi Sakamoto,Amarnauth Singh,Robert Shick,Karl Skjonnemand,Philippe Foubert,Waut Drent
ADVANCES IN PATTERNING MATERIALS AND PROCESSES XL (2023)
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Author Statistics

#Papers: 110

#Citation: 1654

H-Index: 23

G-Index: 37

Sociability: 6

Diversity: 2

Activity: 2

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