基本信息
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Bio
R. Anzalone was born in Catania, Italy, in 1979. He received the B.S. degree in physics in July 2005 and the Ph.D. degree in material science in March 2010 from the University of Catania, Catania. His Ph.D. work was focused on the silicon carbide (3C–SiC) growth process and its applications, and his Ph.D. dissertation was focused on the heteroepitaxial 3C–SiC layer on silicon substrate for MEMS applications.
In October 2005, he joined the Frascati Research Center, Italian National Agency for New Technologies, Energy and the Environment (ENEA), Rome, Italy, where he worked on inertial fusion confinement. Since 2011, he has held a postdoctoral post at the Institute of Microelectronics and Microsystems, National Research Council (CNR–IMM), Catania. His research interests include the development of heteroepitaxial 3C–SiC thin films and the study of SiC mechanical proprieties for MEMS and sensor applications.
Research Interests
Papers共 117 篇Author StatisticsCo-AuthorSimilar Experts
By YearBy Citation主题筛选期刊级别筛选合作者筛选合作机构筛选
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期刊级别
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Defect and diffusion forum/Diffusion and defect data, solid state data Part A, Defect and diffusion forum (2024): 117-121
2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)pp.1-5, (2024)
Solid State Phenomena (2024): 41-45
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2023)
Microelectronic Engineering (2023): 112116-112116
Microelectronic engineering (2023): 111962-111962
Materials Science Forum (2022): 69-73
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Author Statistics
#Papers: 117
#Citation: 1505
H-Index: 21
G-Index: 34
Sociability: 6
Diversity: 3
Activity: 3
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