Ronald G. Dixson

Ronald G. Dixson received the Ph.D. degree in physics from Yale University, New Haven, CT. He has been a Staff Scientist in the Manufacturing Engineering Laboratory, National Institute of Standards and Technology (NIST), Gaithersburg, MD, since 1994. He works primarily on atomic force microscope dimensional metrology and standards development at NIST—including the NIST calibrated atomic force microscope project. Between 2001 and 2004, he spent three years as the first NIST Guest Scientist at SEMATECH where he developed a CD-AFM based reference measurement system and utilized this system for the 2004 release of single crystal critical dimension reference materials to SEMATECH member companies. He now continues to work on furthering CD-AFM metrology at NIST and has research interests in calibration methods, traceability, and uncertainty analysis in AFM dimensional metrology. Dr. Dixson is a member of SPIE and the American Physical Society (APS).