Research Interests
(1) Thin film deposition: Atomic layer deposition (ALD) and plasma enhanced chemical vapor deposition (PECVD) of oxides, nitrides, metals, perovskites, etc.
(2) Nanostructures for energy conversion and storage: 3-D nanostructured thin films for solar water splitting photoelectrodes
(3) Electronic materials: Nanoscale thin films for microelectronic devices, including ultrathin metal layers, high-k dielectrics