Werner Boullart

Werner Boullart received the Ph.D. degree in chemistry from the Catholic University of Leuven (KU Leuven) in 1989. He has been the Manager of the plasma etch group with IMEC since 2001. He has 15 years of experience in plasma etching, plasma ashing, and wet etch residue removal. He is author and/or co-author of over 50 scientific publications, including invited presentations at major international conferences. Prior to his professional career at IMEC, he worked as a researcher with the KU Leuven in the domain of atmospheric chemistry.