Wen-Fa Wu

Wen-Fa Wu was born in Kaohsiung, Taiwan, R.O.C., in 1967. He received the B.S. degree in electronics engineering from National Chiao Tung University, Hsinchu, Taiwan, in 1990, and the Ph.D. degree from Institute of Electronics, National Chiao Tung University, in 1994. He joined the National Nano Device Laboratories (NDL), Hsinchu, as an Associate Researcher since 1994. He is engaged in developing metallization technology on IC manufacturing. His research interests include conductor systems of Cu and Al metallization, salicide technology, electromigration and stress migration, and integration of Cu and low-k dielectrics.