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论文共 31 篇作者统计合作学者相似作者

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Elimination of 3D NAND Through-Array Contact Shortage on Yield Enhancement
Kuan-Ting Lu,Yuan-Chieh Chiu, Cheng-En Tsai, Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen, Chih-Yuan Lu
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-5, (2025)
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Global Tilt Extraction for BEOL Contact Landing Displacement Control
Yung-Yi Lin, Tien-Jung Lee, Hsiao-Fei Su, Yen-Hung Liu,Chao-Yu Cheng, Christopher Liman, Boxue Chen,Zhengquan Tan,Yuan-Chieh Chiu, Chiung-Kun Huang, Ying-Hung Liang,Hong-Ji Lee,Nan-Tzu Lian
METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2024)
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A Case of Plasma-Induced Film Breakdown in 3D NAND BEOL Dielectric Etch
Ying-Hung Liang,Yuan-Chieh Chiu,Zusing Yang,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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The Constraint Artificial-Intelligence Assisted Method for Etching Structure Optimization
Zusing Yang, Ying-Hung Liang, Cheng-En Tsai,Ming-Tsung Wu,Yuan-Chieh Chiu,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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Study of Plasma Ash Rate Enhancement by Machine Learning Models for TAT Improvement
Shao-Lou Jheng, Jyunhong Wu,Zusing Yang,Yuan-Chieh Chiu,Ming-Tsung Wu,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2021)
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作者统计

#Papers: 31

#Citation: 1221

H-Index: 14

G-Index: 19

Sociability: 4

Diversity: 2

Activity: 0

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