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Research Interests

Papers共 16 篇Author StatisticsCo-AuthorSimilar Experts

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AI-Powered Etching Architecture Refinement from Small Data in 3D NAND Development
Cheng-En Tsai, Ming-Tsung Wu,Nan-Tzu Lian, Chih-Yuan Lu,Zusing Yang, Kuan-Ting Lu,Tahone Yang, Min-Hsuan Huang, Hong-Ji Lee,Kuang-Chao Chen
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2025)
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A Case of Plasma-Induced Film Breakdown in 3D NAND BEOL Dielectric Etch
Ying-Hung Liang,Yuan-Chieh Chiu,Zusing Yang,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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The Constraint Artificial-Intelligence Assisted Method for Etching Structure Optimization
Zusing Yang, Ying-Hung Liang, Cheng-En Tsai,Ming-Tsung Wu,Yuan-Chieh Chiu,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2024 35TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE, ASMC (2024)
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Study of Plasma Ash Rate Enhancement by Machine Learning Models for TAT Improvement
Shao-Lou Jheng, Jyunhong Wu,Zusing Yang,Yuan-Chieh Chiu,Ming-Tsung Wu,Hong-Ji Lee,Nan-Tzu Lian,Tahone Yang,Kuang-Chao Chen,Chih-Yuan Lu
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)pp.1-4, (2021)
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Author Statistics

#Papers: 16

#Citation: 104

H-Index: 5

G-Index: 8

Sociability: 3

Diversity: 1

Activity: 0

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