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45-Nm Silicon-on-insulator CMOS Technology Integrating Embedded DRAM for High-Performance Server and ASIC Applications

S. S. Iyer,G. Freeman,C. Brodsky,A. I. Chou,D. Corliss, S. H. Jain,N. Lustig,V. McGahay,S. Narasimha,J. Norum,K. A. Nummy,P. Parries,S. Sankaran,C. D. Sheraw,P. R. Varanasi,G. Wang,M. E. Weybright,X. Yu,E. Crabbe,P. Agnello

IBM journal of research and development（2011）

Cited 21|Views17
Key words
Random access memory,Lithography,Logic gates,FETs,Imaging,Capacitors
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