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Microshutter Array Development for the James Webb Space Telescope

MJ Li, N Acuna,E Amatucci, M Beamesderfer,R Boucarut, S Babu,S Bajikar,A Ewin,R Fettig,D Franz, L Hess,R Hu,M Jhabvala, D Kelly,T King,G Kletetschka,C Kotechi,A Kutyrev,J Loughlin,BA Lynch,H Moseley,B Mott,B Newell, L Oh,D Rapchun,C Ray, C Sappington,E Schulte,S Schwinger,W Smith, S Snodgrass,L Sparr, R Steptoe-Jackson,LQ Wang, Y Zheng,C Zincke

MICRO- AND NANOTECHNOLOGY MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS II（2005）

Cited 32|Views29
Key words
microshutter,magnetic actuation,MEMS,RIE,DRIE,micro-optics,near-infrared,space telescope
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