Effect of refractive index on the determination of layer thickness of 4H-SiC homo-epitaxial filmsZhiyun Li,Jiwei Sun,YuMing Zhang,Yimen Zhang,Xiaoyan TangTMS Annual Meeting（2010）引用 0|浏览2关键词4H-SiC,Refractive index,ThicknessAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
