Microstructure Modulation in Copper InterconnectsC. -C. Yang,B. Li,F. H. Baumann,J. Li,D. Edelstein,R. RosenbergIEEE Electron Device Letters(2014)引用 16|浏览29关键词Copper,grain size,stress,electromigrationAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要