Synthesis and Investigation of Nanocrystalline SiC Properties in Sensor Applications
ASDAM '02, CONFERENCE PROCEEDINGS（2002）
关键词
chemical sensors,electrical resistivity,materials preparation,nanostructured materials,silicon compounds,thermal conductivity,wide band gap semiconductors,4.95 Mohm,48.5 Mohm,750 K,SiC,chemical sensors,electro-physical properties,fabrication regime,nanocrystalline SiC,resistance,sensor applications,solid state reactions,synthesis,thermal resistance coefficients,thermodynamical rules
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