Thin, Fully Depleted Monolithic Active Pixel Sensor Based on 3D Integration of Heterogeneous CMOS Layers
2009 IEEE Nuclear Science Symposium Conference Record (NSS/MIC)（2009）
关键词
nuclear electronics,position sensitive particle detectors,readout electronics,silicon radiation detectors,3D electronics,3D integration,CMOS MAPS prototype,CMOS wafers,buffer voltage amplifier,digital readout,fully depleted monolithic active pixel sensor,heterogeneous CMOS layers,high resistivity epitaxial wafers,self-triggering data flow,silicon layer charge sensing diode,ultra thin CMOS radiation sensors
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