Benefits of Higher-Order Particles in Simulating Microwave Plasma Interactions Using a Particle-in-Cell Code
Norfolk, VA（2010）
Key words
argon,plasma density,plasma kinetic theory,plasma nonlinear processes,plasma pressure,plasma production,plasma radiofrequency heating,plasma sheaths,plasma simulation,plasma temperature,space charge,Ar,Debye length,artificial plasma heating,cold dense plasma,electron temperature,frequency 2.45 GHz,high pressure plasma,high-order particle algorithm,kinetic effect,microwave plasma interaction,nonlinear effect,particle-in-cell code,plasma production rate,pressure 0.05 torr,space charge effect
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