Development of Low-Energy and High-Current-Density Ion Beam System

H. Sakakita,S. Kiyama,Y. Hirano,H. Koguchi,T. Shimada,Y. Sato

REVIEW OF SCIENTIFIC INSTRUMENTS（2012）

Natl Inst Adv Ind Sci & Technol

Cited 8|Views9

Abstract

A low-energy ion beam system operating at a dc voltage of less than 300 V was developed using an ion source with a multicusp magnetic field. A high-current-density ion beam of 6.9 mA∕cm(2) was successfully extracted at the electrode. The beam extraction characteristics for flat and concave electrodes were compared. In the case of a concave electrode with a designed focal length of 350 mm, it was observed that the beam profile was sharper than that obtained using a flat electrode.

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