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Finite Element Analysis of Capacitive Micromachined Ultrasonic Transducer (cmut) for Nde Applications

AIP conference proceedings(2006)

Indian Inst Technol

Cited 1|Views10
Abstract
This paper presents a comparison of three Finite Element approaches for modeling the behavior of a Capacitive Micromachined Ultrasonic Transducer (CMUT). CMUTs have become very popular over the last decade because of the comparable bandwidth, sensitivity and dynamic range with its piezoelectric counterparts. The ease of fabrication is an added advantage. Modeling of CMUTs is a coupled physics problem, which involves solving Electrostatics and Structural interactions simultaneous. Finite Element models of the CMUT are constructed using the commercial code ANSYS (9.0). Three different approaches of solving the coupled field problem are discussed and the results are compared for resonance frequency, collapse voltage, capacitance and electromechanical coupling coefficient. The approaches discussed involve sequentially coupled-field analysis, direct coupled-field analysis and reduced order modeling. Detailed results have been presented for the effect of variation in geometrical factors as predicted by the three models.
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CMUT,ultrasound,couple physics analysis,reduced order model
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要点】:本文对比了三种有限元方法在模拟电容微机械超声换能器(CMUT)行为上的应用,突出了不同方法在求解电静力学和结构相互作用耦合问题中的性能差异。

方法】:通过ANSYS(9.0)商业软件构建CMUT的有限元模型,采用顺序耦合场分析、直接耦合场分析和降阶建模三种方法来处理电场与结构场的耦合问题。

实验】:使用ANSYS软件对CMUT模型进行仿真实验,通过三种模型对比分析了共振频率、崩溃电压、电容和机电耦合系数等参数,并详细展示了不同几何因素变化下的预测结果。数据集名称未在摘要中提及,故无法提供。