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METHODS OF PROVIDING PATTERNED CHEMICAL EPITAXY TEMPLATES FOR SELF-ASSEMBLABLE BLOCK COPOLYMERS FOR USE IN DEVICE LITHOGRAPHY

Emiel Peeters,Wilhelmus Sebastianus Marcus Maria Ketelaars,Sander Frederik Wuister,Roelof Koole,Christianus Martinus Van Heesch,Aurelie Marie Andree Brizard,Henri Marie Joseph Boots,Thanh Trung Nguyen,Oktay Yildirim

mag（2015）

Cited 25|Views18
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