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(Invited) Factors Impacting Threshold Voltage in Advanced CMOS Integration: Gate Last (FINFET) Vs. Gate First (FDSOI)

Dina Triyoso,Rick Carter,Jon Kluth,Scott Luning,Amy Child,Jeremy Wahl,Bob Mulfinger,Kasun Punchihewa,Anil Kumar,Laegu Kang,Ryan Sporer,Xiaobo Chen,Sherry Straub,Girish Bohra,Suraj Patil,Xing Zhang,Alex Chen,Mitsuhiro Togo,Rohit Pal

ECS Transactions（2015）

引用 23|浏览8
关键词
CMOS Scaling,Metal Gate Transistors,Double-Gate Transistors
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