Self-aligned contactsMark Bohr,Tahir Ghani,Nadia M Rahhalorabi, Subhash M Joshi,Joseph M Steigerwald,J Klaus,Jack Hwang,Ryan Mackiewiczmag(2013)Cited 23|Views10AI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined