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Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties

H. Wojcik,M. Junige,W. Bartha,M. Albert,V. Neumann,U. Merkel,A. Peeva,J. Gluch,S. Menzel,F. Munnik,R. Liske,D. Utess,I. Richter,C. Klein,H. J. Engelmann,P. Ho,C. Hossbach,C. Wenzel

Journal of The Electrochemical Society（2011）

Cited 21|Views54
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