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Experimental Measurements of Telecentricity Errors in High-Numerical-aperture Extreme Ultraviolet Mask Images

Sudharshanan Raghunathan,Obert R. Wood,Pawitter Mangat,Erik Verduijn,Vicky Philipsen,Eric Hendrickx,Rik Jonckheere,Kenneth A. Goldberg,Markus P. Benk,Patrick Kearney,Zachary Levinson,Bruce W. Smith

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena（2014）

引用 19|浏览19
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