Plasma‐Enhanced Atomic Layer Deposition of Palladium on a Polymer SubstrateGregory A. Ten Eyck,Samuk Pimanpang,Jasbir S. Juneja,Hassaram Bakhru,Toh-Ming Lu,Gwo-Ching WangCHEMICAL VAPOR DEPOSITION（2007）引用 37|浏览6关键词amine,palladium,parylene-N,PEALD,polymerAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
