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Microfabrication Technology for Large Lekid Arrays: from Nika2 to Future Applications

J. Goupy,A. Adane,A. Benoit,O. Bourrion,M. Calvo,A. Catalano,G. Coiffard,C. Hoarau,S. Leclercq,H. Le Sueur,J. Macias-Perez,A. Monfardini, I. Peck,K. Schuster

Journal of Low Temperature Physics（2016）

Cited 17|Views2
Key words
Kinetic inductance detectors,Microfabrication,Large array
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