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PPAC Scaling Enablement for 5nm Mobile SoC Technology

Mustafa Badaroglu,Jeff Xu,John Zhu,Da Yang,Jerry Bao,Seung-Chul (S. C. ) Song,Peijie Feng,Romain Ritzenthaler,Hans Mertens,Geert Eneman,Naoto Horiguchi,Jeffrey Smith,Suman Datta,David Kohen, Po-Wen Chan, Keagan Chen,P. R. Chidi Chidambaram

2017 47th European Solid-State Device Research Conference (ESSDERC)（2017）

Cited 15|Views50
Key words
5nm,More Moore scaling,process technology,integration,finFET,gate-all-around,nanowire,PPAC
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