Experimental Demonstration of Performance Improvement with A Strain Boost Technique Tailored for 3-Dimensional Structure on Nano-Scaled Bulk Pfinfets

Ta-Chun Lin,Yun-Ju Sun,Ming-Huei Lin,Tomonari Yamamoto,Shyh-Horng Yang

2016 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA)（2016）

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关键词

strain boost technique,3-dimensional structure,nano-scaled bulk pFinFET,longitudinal stress,effective mobility,injection velocity,saturation drain current,ring oscillator speed,electrostatics

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