Asymmetric etching profile control during high aspect ratio Plasma etch
2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)（2018）
Key words
asymmetric etch,high aspect ratio etch,3D NAND
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined