Extremely Steep Switch of Negative-Capacitance Nanosheet GAA-FETs and FinFETs

M. H. Lee,K-T. Chen,C-Y. Liao,S-S. Gu,G-Y. Siang,Y-C. Chou,H-Y. Chen, J. Le,R-C. Hong,Z-Y. Wang,S-Y. Chen,P-G. Chen,M. Tang,Y-D. Lin, H-Y. Lee,K-S. Li,C. W. Liu

2018 IEEE International Electron Devices Meeting (IEDM)（2018）

Cited 37|Views38

Key words

current magnitude,NC-FinFET,extremely steep switch behavior,FET scale,dramatic current switch,Negative Differential Resistance,strong NC boost,super-steep slope,current behavior,stacked NC-NSGAA,NC effect,capacitance matching,negative-capacitance Nanosheet GAA-FETs

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