Toward Epitaxial Ternary Oxide Multilayer Device Stacks by Atomic Layer DepositionPeter J. King,Marko Vehkamaki,Miika Mattinen,Mikko J. Heikkila,Kenichiro Mizohata,Wontae Noh,Markku Leskela,Mikko RitalaJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A（2019）引用 6|浏览42AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
