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Modification of Elastic Deformations and Analysis of Structural and Optical Changes in Ar+-implanted AlN/GaN Superlattices

Liubchenko Oleksii,Sabov Tomash,Kladko Vasyl,Melnik Viktor,Yukhymchuk Volodymyr,Romanyuk Borys,Kolomys Oleksandr,Hreshchuk Oleksandr,Dubikovskyi Oleksandr,Maksimenko Zoia,Gudymenko Oleksandr,Belyaev Alexander

Applied Nanoscience（2019）

引用 11|浏览49
关键词
Strain relaxation,AlN/GaN superlattice,Ion implantation,Photoluminescence,XRD,SIMS,Raman spectroscopy,MQW
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