Processing of AC-coupled N-in-p Pixel Detectors on MCz Silicon Using Atomic Layer Deposited Aluminium Oxide

J. Ott,A. Gadda,S. Bharthuar,E. Brucken,M. Golovleva,J. Harkonen,M. Kalliokoski,A. Karadzhinova-Ferrer,S. Kirschenmann,V. Litichevskyi,P. Luukka,L. Martikainen,T. Naaranoja

Nuclear instruments and methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment/Nuclear instruments & methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment（2020）

Cited 10|Views50

Key words

Atomic layer deposition (ALD),Al2O3,Pixel detector,Capacitive coupling

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