Thin-Entrance Window Sensors for Soft X-rays at LCLS-II
2018 IEEE Nuclear Science Symposium and Medical Imaging Conference Proceedings (NSS/MIC)（2018）
Key words
X-ray spectrum,soft X-rays,dopant diffusion,low energy arsenic implant,dopant profile deeper,SIMS measurements,electrical test,backside diode contact,high-resistivity silicon sensors,microwave annealing technology,high temperature anneal,electron lasers,thin-entrance window sensors,planar sensor device wafer,microwave anneal process,Si
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