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Q-enhanced Lithium Niobate SH0 Resonators with Optimized Acoustic Boundaries

2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF/IFC)(2019)

Cited 42|Views10
Key words
piezoelectricity,lithium niobate,quality factor,plate wave,impedance transformation,perfectly matched layer
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