CHAOTIC SIGNAL GENERATION IN THE MHz RANGE WITH A MONOLITHIC CMOS-MEMS MICROBEAM RESONATOR
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（2019）
关键词
Lyapunov exponent,homoclinic chaotic motion,readout circuit,clamped-clamped beam resonator,cc-beam resonator,CMOS technology,submicrometric MHz resonator,monolithic CMOS-MEMS microbeam resonator,MHz range,chaotic signal generation,size 0.35 mum
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