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Study on Effect of Process and Structure Parameters on SiNxHy Growth by In-Line PECVD

Yujin Cao,Jicheng Zhou,Yaqing Ren, Wei Xu,Wenfeng Liu,Xianwu Cai,Baoxing Zhao

Solar Energy（2020）

Cited 9|Views7
Key words
In-line PECVD,SiNxHy film,COMSOL,Multi-field coupling simulation,Solar cell
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