Nanofabrication of 50 Nm Zone Plates Through E-Beam Lithography with Local Proximity Effect Correction for X-Ray Imaging
Chinese Physics B（2020）
Key words
Fresnel zone plates,electron beam lithography,local proximity effect correction,x-ray imaging,50 nm resolution
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined