Effect of Solid-State Epitaxial Recrystallization on Defect Density in Ultrathin Silicon-on-Sapphire Layers
Physics of the Solid State（2019）
Key words
silicon-on-sapphire,epitaxy,heteroepitaxy,gas-phase epitaxy,silicon-on-dielectric,solid-phase recrystallization,ultrathin silicon,implantation
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