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(Invited) Materials and Processes for Superconducting Qubits and Superconducting Electronic Circuits on 300mm Wafers

S. S. Papa Rao,C. Hobbs,S. Olson,N. Foroozani,H. Chong,H. Stamper, B. Martinick, D. Ashworth,B. Bunday,M. Malloy,E. Holland, J. Nalaskowski,P. Kearney,T. Ngai,I Wells,M. Yakimov,S. Oktyabrsky,B. O'Brien,V Kaushik,K. A. Dunn,K. Beckmann,M. Rodgers,T. Murray,S. Novak, B. Baker-O'Neal, C. Borst,K. D. Osborn,M. Liehr

SILICON COMPATIBLE MATERIALS, PROCESSES, AND TECHNOLOGIES FOR ADVANCED INTEGRATED CIRCUITS AND EMERGING APPLICATIONS 8（2018）

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