The Effect of Laser Beam Intensity and Microscope Illumination Intensity, on the Response of Electrostatic Resonators
IEEE Sensors Journal（2020）
关键词
Sensors,Measurement by laser beam,Resonators,Resonant frequency,Vibrometers,Lighting,Rotors,Electrostatic resonators,laser vibrometers,residual stress,thermal stress,silicon on insulator (SOI)
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要