Effect of In-situ Capping on Phase Change Memory Device Performance AEPM: Advance Equipment Processes and Materials
2020 31ST ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)（2020）
Key words
phase change memory,mushroom cell,in-situ capping,top electrode,air-break
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined