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AC-coupled N-in-p Pixel Detectors on MCz Silicon with Atomic Layer Deposition (ALD) Grown Thin Film

A. Gadda,J. Ott,S. Bharthuar,E. Brucken,M. Kalliokoski,A. Karadzhinova-Ferrer,M. Bezak,S. Kirschenmann, V Litichevsky,M. Golovleva,L. Martikainen,A. Winkler,V Chmill,E. Tuovinen,P. Luukka,J. Harkonen

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT（2021）

Cited 5|Views74
Key words
Pixel detector,Magnetic Czochralski silicon,Atomic layer deposition,Flip chip bonding
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