Defect Loss and Its Physical Processes

Jian Fu Zhang,Meng Duan,Mehzabeen Mehedi,Kean Hong Tok, Zeliang Ye,Zhigang Ji,Weidong Zhang

IEEE International Conference on Solid-State and Integrated Circuit Technology（2020）

Cited 0|Views13

Key words

defect loss,physical processes,device performance,threshold voltage,driving current,operation speed,device lifetime,interface states,anti-neutralization positive charges,thermally activated process,MOSFET

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