Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope

Yusheng Wang,Yu-Wei Lin,Janna Glaze,Gabrielle Davis Vukasin,Dongsuk D. Shin,Hyun-Keun Kwon,David B. Heinz,Yunhan Chen,Dustin D. Gerrard,Thomas W. Kenny,Andrei M. Shkel

Journal of Microelectromechanical Systems（2021）

引用 29|浏览16

关键词

Resonators,Resonant frequency,Energy dissipation,Q-factor,Micromechanical devices,Damping,Silicon,Energy dissipation,MEMS resonators,quality factor,TRG

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