多晶硅定向凝固过程中热应力的建模研究
Journal of Xiamen City Vocational College（2019）
Abstract
在硅熔体经过定向凝固转变为固态的过程中,体积增大、 密度减小,硅铸锭温度分布不均,容易造成热涨热缩,同时坩埚的约束使热应力进一步增大与复杂化.利用传热学和弹性力学原理来建立数学模型,通过网格化计算域,可以用数值方法求解硅铸锭中热应力的分布情况,并获得定向凝固速率最高限值的变化曲线.数学模型表明,由于硅铸锭的形变和坩埚的约束作用,最大应力值出现在硅铸锭上部边角区域,最大剪切应力则出现在靠近中心区域,这可以为实验与生产实践提供理论依据.
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