Characterizations of Electrolyte–Insulator–Semiconductor Sensors with Array Wells and a Stack-Sensing Membrane
IEEE TRANSACTIONS ON ELECTRON DEVICES（2020）
Key words
Sensor arrays,Hysteresis,Sensitivity,Sensor phenomena and characterization,Silicon,Biomembranes,3-Aminopropyltriethoxysilane (APTES),electrolyte-insulator-semiconductor (EIS),nanoimprint,patterns
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